Bill, Take a look at his desired feature size though. He wants a strip that is 4 *cm* long, with the slope running the entire length of that feature. Are you suggesting an image reversal process to provide a +22 to -22 degree angle over a total length of 4 cm? - Kevin On Mon, Feb 28, 2011 at 3:22 PM, Bill Moffatwrote: > Slopes in positive resist are easy. +22 degrees to -22 degrees from the vertical, flood exposure allows perfect control of angle, using image reversal. I have personally done 40 microns thick positive resist. Thicker is possible but would need experiments. Bill Moffat.