It is a solvent called Dynasolve 264 (I am not sure about the number). It
is not so expensive but is hard to find in Europe.

This was the only one who succeed in removing the PDMS from my Si

Hope this helps
Petru

La data de 09.03.2011, 16:18, righeira carnegie  a
scris:
> I am having problems cleaning this Hard mask, That is to remove the extra

> PDMS that is stuck to the hard mask. We tried O2 plasma, IPA with and
> without ultrasonicating. Nothing is helping that poor PDMS to detach from
> the silicon hard mask. How do you guys do it?
> Another problem is making the PDMS mold for the NIL process. When made
> there
> is a formation of clarity diorder it looked like a fogged glass. what do
> you
> guys think this is? help needed.
> Thanks for replying,

> sung mung,
> International Scholar,
> IMEC
> Belgium.