Hi Qui,

there are 2 possibilities:

1) to use a high resolution x-ray difractometer

2) see the following papers:

Micromech. Microeng. 16 (2006) 2177–2182
Microsystem Technologies 11 (2005) 117–128
J. Micromech. Microeng. 6 (1996) 279–284

Best regards,
Andrea

-----Messaggio originale-----
Da: mems-talk-bounces+mazzolari=fe.infn.it@memsnet.org
[mailto:mems-talk-bounces+mazzolari=fe.infn.it@memsnet.org] Per conto di Qi
Luo
Inviato: Monday, March 14, 2011 8:28 PM
A: General MEMS discussion
Oggetto: [mems-talk] Finding [110] direction on (100) SOI wafer

Greetings everyone,

I would like to find out the exact [110] crystal direction of a (100) SOI
wafer before my first mask. The top Si (100) is about 200um thick. Wafer
will come with flat supposedly aligned to [110] direction, yet may have
anyway from 0 to 3 degree alignment variation to [110]. Your suggestions
would be greatly appreciated.

Best regards,

--- Qi Luo