Hi,

Look at this:

Mattias Vangbo and Ylva Bäcklund 1996 J. Micromech. Microeng. 6 279

Arno


An: General MEMS discussion
Betreff: [mems-talk] Finding [110] direction on (100) SOI wafer

Greetings everyone,

I would like to find out the exact [110] crystal direction of a (100) SOI wafer
before my first mask. The top Si (100) is about 200um thick. Wafer will come
with flat supposedly aligned to [110] direction, yet may have anyway from 0 to 3
degree alignment variation to [110]. Your suggestions would be greatly
appreciated.

Best regards,

--- Qi Luo