Hi Dave, I already used an acid zincate process. Minimizing pre-etching I also tried. Sometimes it works but often the structures peel-of after the Ni-Step. After succesful plating of a sample I always have those high ohmic resistances... And I wonder. Perhaps an oxid grows anywhere between two layers? Chris -----Ursprüngliche Nachricht----- Von: mems-talk-bounces+engel.christian=gmx.de@memsnet.org [mailto:mems-talk-bounces+engel.christian=gmx.de@memsnet.org] Im Auftrag von David Roberts Gesendet: Donnerstag, 17. März 2011 06:12 An: 'General MEMS discussion' Cc: dave@beakeronastick.com Betreff: Re: [mems-talk] Electric problem after electroless plating Hi Chris, Preparing the aluminum for E-less nickel - Clean, etch, de-ox and zincate removes a significant amount of aluminum. If you are using an alkaline zincate, this is definitely your problem. I recommend minimizing pre-etch and definitely use an acid zincate process. Regards, Dave