Hello,

Can anyone recommend an RIE recipe for etching RF sputtered barium strontium
titanate?  It is ~ 500nm thick and it's on alumina substrates.

Thanks,

Tony Price
RF Microsystems Research Group

University of South Florida
4202 E. Fowler Avenue, ENB-118,
Tampa, FL, 33620
Office: ENB 412
Phone: (404) 291-3506