Hi MEMSer... I am try to do bonding Silicon to Silicon with thin E-gun evaporated 7740 glass layer... Does anybody have such experience on this? Any suggestions? Besides I can't find the target for this process , should I directly cut the 7740 glass substrate as the target? Would this damage the E-gun chamber? Or, any alternatives? Thanks a lot, Best regards, ____________________________________________ Jerry Lee (Jia-Hong Lee) Insitute of Applied Mechanics, National Taiwan University Taipei, Taiwan, ROC e-mail: iamjhlee@email.com r6543023@gauss.iam.ntu.edu.tw "Try then error is better than no try"