Hi,

I've got an old  Veeco AP 150 automatic 4-point probe. Everything works fine,
but I don't have the corresponding software. In manual mode it would be a
hard to collect the data from a full wafer mapping (5 or 9 point
measurements can be done using the Display). I already tried to contact
Veeco (they don't sell any 4PP anymore) but didn't get any response. I'm
looking for a description of the serial protocol to interface the machine.
Does anybody have access to a manual or the old software for a Veeco AP150?


Best regards, Ben