durusmail: mems-talk: wafer dicing
wafer dicing
1999-05-21
wafer dicing
JT
1999-05-21
We need to dice an anodically bonded wafer stack.
There is a 12 mil thick silicon wafer on top of a 60
mil thick pyrex wafer in this stack.  We need help on
method of wafer hold-down during dicing, type of
blade, and dicing parameters.  Any suggestion is
greatly appreciated.  Thank you.

James Tavis


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