Right, if you are working with the photonics crystal, I would say that
the dimensions are in sub micron range, even if you are in few micron
range.

Two things, you can try out. The PDMS should not change either doing the
curing at room temperature or at high temperature for rapid curing.

First, Pour the PDMS in the vacuum as well cure it in vacuum chamber for
the best results so that air trap into the holes not let the fill the
holes , and second, use appropriate release agent so that while
releasing the structures , they are not breaking at the tip to change
the height of the structures.

Good luck!


Parshant Kumar Ph.D.|
The Charles Stark Draper Laboratory |MS37|555 Technology Square |
Cambridge. MA, 02139-3563|Tel: 617-258-4417|Fax: 617-258-4238 |
Email:- pkumar@draper.com |www.draper.com