Hi, On page 2 of this document: http://www.microchem.com/products/pdf/SU-82000DataSheet2025thru2075Ver4.pdf you will find that increasing the spin speed will reduce the thickness of the coated resist. I hope this helps. Rgds, Wutthinan Thai MicroElectronics Center (TMEC) http://tmec.nectec.or.th > Dear everyone, > > I am using SU-8 2075 in photolithography. I want to get a thin film after spin > coating so i intend to use IPA to dilute su-8, but it does not work. Has anybody > encountered this problem? How do you dilute the su-8? > > Any suggestion will be highly appreciated. > > Thanks in advance. > Regards