Microchem sells a thinner specifically for the SU8 series of resists. I'm
not sure IPA will work for this.

On Apr 20, 2011 10:01 AM,  wrote:
> Hi,
>
> On page 2 of this document:
>
> http://www.microchem.com/products/pdf/SU-82000DataSheet2025thru2075Ver4.pdf
>
> you will find that increasing the spin speed will reduce the thickness of the
> coated resist.
>
> I hope this helps.
>
> Rgds,
> Wutthinan