You should use cyclopentanone (CP) for dilution of the SU-8 2000 series. IPA is actually not compatible as a diluent for this material. Mike -----Original Message----- From: mems-talk-bounces+mstan=microchem.com@memsnet.org [mailto:mems-talk- bounces+mstan=microchem.com@memsnet.org] On Behalf Of 첸로 Sent: Wednesday, April 20, 2011 7:10 AM To: mems-talk Subject: [mems-talk] dilute SU-8 2075 Dear everyone, I am using SU-8 2075 in photolithography. I want to get a thin film after spin coating so i intend to use IPA to dilute su-8, but it does not work. Has anybody encountered this problem? How do you dilute the su-8? Any suggestion will be highly appreciated. Thanks in advance. Regards