I would avoid heating it. You're likely going to end up with a
non-uniform mess on your hands when the SU-8 cools at different rates
across the wafer (assuming it's not almost instantly back to room
temperature anyway, since the surface to volume ratio will be so
high). Unless you heat it in a sealed container (which would be a bad
idea) you'll also evaporate the cyclopentanone, which will leave you
with a more viscous solution than you started with. Repeatability on
the process you're proposing will be poor.

- Kevin

2011/4/20 첸로 :
> Dear Kevin Nichols,
>
> Thanks alot for your comment. as you said maybe i shold buy a new one.
> Now i am trying to heat the viscous SU-8 before spin coating and will check
> whether it will work.
>
> Regards