Hi, In my opinion, the su-8 does not evaporate well. You can have a tweezer to check prior to UV expose. I always do that and it will help. Regards At 2011-04-22 04:38:22,"Michael Riss"wrote: >Hi, > >my experience with Polystyrene is that it starts to get soft at >~60-70 °C. So I would double-check that the type of Polystyrene you >use can stand the soft-baking/cross-linking temperature >(typically 95 °C) without melting and mixing with the SU-8 and >SU-8 solvent on top. > >Regards, >Michi