Hi all,

We usually do liquid HDMS priming with unreliable results, so we would like
to upgrade to vapor prime. Can you recommend me any manufacturer with
systems suitable (cheap) for a small university lab? (we process 2'' wafers)


Thanks, and best regards,

Enrique San Andrés.
Universidad Complutense de Madrid.

-----Mensaje original-----
De: Andrew Sarangan [mailto:asarangan@gmail.com]
Enviado el: lunes, 09 de mayo de 2011 17:09
Para: General MEMS discussion
Asunto: Re: [mems-talk] Problem BOE SiON underetching too high

I have problems with resist adhesion on oxides or nitrides with BOE if
I don't use HMDS. I can't comment on liquid priming since I always do
the vapor priming method. But I suspect this might be your main issue.
If your features are not too small, you can also try a PMGI
undercoating (Lift-off resist). They often tend to have greater
adhesion to dielectrics than the straight resist.