Thanks all. The reason I chose Cr is that it can be dry etched to leave my substrate transparent (glass substrate). I need to remove any seed layer outside the electroplating area. Cu seeds hard to be removed by etching. Anyway, I will try Cr/Au first and update here. On Mon, May 23, 2011 at 10:44 AM,wrote: > I have tried electroplating Ni and Cu directly on a Cr seed layer with no > luck. The electroplated Ni and/or Cu have no adhesion. > > For copper, I've used a seed layer of Cr for adhesion and a thin Cu layer > to be able to electroplate Cu on top of it. Both Cr seed and thin Cu > layers were deposit by sputtering. Other possibility is to use Ti as > adhesion. I'm not able to deposit Ni at the moment, but I would suggest > the same method for the Ni electroplating or you could use a Cu layer and > electroplate Ni over it. This should not be a problem. > > regards > > Gustavo Rehder > Universisty of São Paulo