I have used NMP at 80C and it performs successfully for lift off. Acetone does
not perform as effectively as NMP can.


Kind Regards
Dr Hamood Ur Rahman,
College of Electrical and Mechanical Engineering
National University of Sciences and Technology (NUST)
Islamabad, Pakistan



________________________________
From: Ivan Baturin 
To: General MEMS discussion 
Sent: Tue, May 24, 2011 7:20:01 PM
Subject: * Re: [mems-talk] metal lift off problem

Hello!

Just 2 cents from me. Except deposition method consider other solvents.
Aceton may be not a good choice for lift-off, especially for resist after
plasma influence (during sputtering). It is better to choose other solvents
line NMP or DMSO. We have used DMSO with success for positive resist - it
attacks resist very aggressively.

Regards,
Ivan