Hello Bill, How do you do that? Is there a solvent which can make the wafer hydrophobic? This seems a good idea. yours, Joseph ------- Original Message ------- Sender : Bill MoffatDate : 2011-06-01 02:18 (GMT+09:00) Title : RE: [mems-talk] dicing problem with silicon wafer Joseph, One solution is to make the surface of the wafer hydrophobic before dicing then the particles do not cling strongly. A weak ater flow can and should wash the particles of easily. We can make your wafers hydrophobic easily and the treatment is only one molecule thick but it survives shipping and time easily. Bill Moffat ------------------------ Joseph Y. Lee Senior Engineer SAMSUNG ELECTRO-MECHANICS CO., LTD. Corporate Technology Operations Headquarters Micro Fab Group TEL: 82-31-300-7331 Mobile: 82-10-3332-1440