Judith why so thin a layer of oxide.  Gary

Gary Hillman
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-----Original Message-----
From: mems-talk-bounces+garyh=s-cubed.com@memsnet.org
[mailto:mems-talk-bounces+garyh=s-cubed.com@memsnet.org]On Behalf Of
Andrew Sarangan
Sent: Monday, June 06, 2011 10:43 AM
To: General MEMS discussion
Subject: Re: [mems-talk] RIE Etching SiO2/Si


SiO2 should make a good etch mask for Si. How deep does the Si have to
be etched? Also depends on the type of SiO2 - thermal, CVD etc..

On Mon, Jun 6, 2011 at 9:05 AM, Judith Linacero Blanco
 wrote:
> Hi all,
>
> Does anybody know how to etch Si with a SiO2 mask? Because I use 50sccm
> HBr, 30mT and 200W in the RIE system, but the selectivity isn't good.
> I only have 20nm of SiO2 to etch silicon.
>
> Thanks a lot,
> Judith