I've once patterned the primed surface (some areas had the HMDS
monolayer, others didn't), and even with long periods of sonication in
acetone, the HMDS monolayer would happily stay on. I was very
impressed


m

On Fri, Jun 10, 2011 at 1:35 PM, Jun Hao  wrote:
> If I am right. Before PR application, the wafers should be primed to promote
> the adhesion of the PR.
>
> HDMS is normally used, and the purpose of it is to make the wafer
> hydrophobic, which can last for a very long time (up to days). Although it
> may not be sufficient enough
>