Hello Meni,

see the answer I gave to Tamar. Basically, I abhor mechanical chucks,
though *I guess* they could maybe be implemented so as not to be
terrible.

I don't recommend.

By the way, which DRIE equipment are your possible candidates?

m

On Sun, Jun 5, 2011 at 1:55 PM, Kabla Meni  wrote:
> Hi,
>
> Based on your experience, which chuck is better for DRIE - electrostatic or
mechanical?
> Could you please elaborate on pro's and con's from your personal experience.
>
> Regards,
> Meni