It may sound like a commercial but be sure to use vacuum vapor prime for HMDS treatment. The reason the HMDS treatment lasts is the vacuum pretreament removes all moisture. Bill Moffat ________________________________________ From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mems-talk- bounces+bmoffat=yieldengineering.com@memsnet.org] on behalf of Ned Flanders [howdilydoo@gmail.com] Sent: Friday, June 10, 2011 9:55 AM To: General MEMS discussion Subject: Re: [mems-talk] dicing problem with silicon wafer I've once patterned the primed surface (some areas had the HMDS monolayer, others didn't), and even with long periods of sonication in acetone, the HMDS monolayer would happily stay on. I was very impressed m