Hi Eric,

If I use Su-8 2005 (film thickness 3.8um) in a sample with 1.5 um height
difference, Can I get the flat surface if I use your method?

Thank you!



----- Original Message ----
From: Eric Johnston 
To: General MEMS discussion 
Sent: Sat, June 11, 2011 3:28:06 AM
Subject: Re: [mems-talk] make the su-8 surface flat

Hi.

We spin coat then let the wafer rest for a day in a covered petri dish.
Then soft bake.

Eric