Unfortunately, dried liquid residue (water spots) is notoriously difficult to
remove.  I would recommend Summa Clean (basically a soapy mixture) and agitation
in a megasonic or ultrasonic tank - as aggressive as your samples can handle.

Dan Ruiz

________________________________

From: mems-talk-bounces+dan.ruiz=honeywell.com@memsnet.org on behalf of Martin
Rumpel
Sent: Sun 6/12/11 5:48 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Contact-free cleaning of limestone on FS/Ta2O5substrates



Hi guys,

I hope this is not a too basic question to post here.

Unfortunately we had a minor flooding in our clean room and as a consequence,
some of our samples and optics (most of them are FS substrates with Ta2O5 or
SiO2 layers, coated by sputtering) became wet and dried before we could clean
them. We have on the samples additionally sub-nm gratings, which makes it
impossible to clean them with just a cloth.

Now there are plenty of residuals from the water; since it was no DI-water I
guess most of it is limestone.

How can I remove this? Simply with dishwasher or shower cleaner in a ultrasonic
cleaning basin?

Because of the sputtered dielectric layers I am a bit hesitant to use acids.

Greetings,
Martin