durusmail: mems-talk: how to avoid air bubbles during imprint process
how to avoid air bubbles during imprint process
2011-06-14
how to avoid air bubbles during imprint process
Xiaohui Lin
2011-06-14
Hi all:

    I am try to use a mold to imprint UV polymer. one issue that troubles me
is that, when contacting the mold with spin coated polymer, it will generate
a lot of tiny bubbles that are trapped in-between the interface. I put it in
vacuum oven for 30min but no obvious change.

Could anyone suggest a bubble free contacting method? Two parts are both
rigid so even contacting from side to side doesn't seem working.

Thanks.

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