Re: [mems-talk] make the su-8 surface flat

durusmail: mems-talk: make the su-8 surface flat

make the su-8 surface flat

2011-06-10

2011-06-10

Khaled Mohamed Ramadan

2011-06-10

2011-06-10

2011-06-10

2011-06-11

2011-06-11

2011-06-12

2011-06-13

2011-06-14

Khaled Mohamed Ramadan

2011-06-14

2011-06-15

2011-06-15

2011-06-16

2011-07-06

2011-07-12

2011-07-16

make the su-8 surface flat

Shane GUO

2011-06-15

Hi Gareth,

It could be. I cleaned my silicon wafer using acetone, IPA and DI water. Then it
is blown dry by N2 and baked for a while.

Thanks