[mems-talk] Isotropic etching SiO2 with PMMA mask

Isotropic etching SiO2 with PMMA mask

2011-07-05

Judith Linacero Blanco

2011-07-05

righeira carnegie

2011-07-06

sangeeth kallatt

2011-07-12

Judith Linacero Blanco

Isotropic etching SiO2 with PMMA mask

Judith Linacero Blanco

2011-07-05

Hi at all,

Does anyone know how to etch the SiO2 (about100nm) with a PMMA mask by chemical
attack? Since I want to attack the SiO2 in all directions.

Best regards,