Hi,

   Has anyone done an HF vapor release on die from the SUMMiT V
process? I'm wondering if the silicon nitride layer swells up like
some of the pictures I have seen in the literature (Thor Bakke et al.,
Etch Stop Materials for release by vapor HF etching, no journal or
conference listed...). Also, does anyone have any experience building
a "home-made" HF vapor release system? Care to share your thoughts and
experiences? Worth doing? or not? controllability and repeatability?

Thanks in advance.

Felix

----------------------------
Felix Lu, Ph.D.
Applied Quantum Technologies, Inc.
Durham, NC 27707