Hi,

Has anyone tried sticking a glass substrate coated with SU8 to a silicon
substrate with an SU8 pattern?

I am trying to accomplish that by using Oxygen Plasma in Reactive Ion Etching
equipment.

After treating them with Oxygen Plasma, I hold the two substrates in contact
with each other in DI water and apply pressure on them.

The substrates clamped to each other are then placed in an Convection oven at 65
C for 20 minutes. The bonding achieved is quite good but a white film is formed
on the bonded area. Does anyone know what causes the white film?

I also tried doing it without DI water but there is no bonding achieved.

Thanks
Best Regards,
Gauri