Hi all.

I have a layered structure with several thin interleaved layers of Al2O3 and
TiO2 on silicon substrate with TiO2 on top which was formed by ALD.
I need to transfer a pattern on the topmost layer. The question is, are
there any ways to remove TiO2 selectively to Al2O3?

Thanks in advance.

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Regards,
Dmitriy Negrov.
Moscow Institute of Physics and Technology.