Mr. Kriechbaum,

I have worked extensively with SU-8 developing full process conditions and
generating spin curves for all SU-8 grades.  Application notes are available
for your 150 micron process as well as other SU-8 grades.  These reports are
available from Electronic Visions upon request.  Please request by email
through info@elvisions.com   or call 602-437-9492
for your copy.
Regards,

Loren St. Clair
Staff Engineer
Electronic Visions

Phone: (602)-437-9492 x 121
Fax: (602)-437-9435

Email: mailto:l.stclair@elvisions.com 

        -----Original Message-----
        From:   Kristopher L Kriechbaum [SMTP:klk+@andrew.cmu.edu]
        Sent:   Monday, May 24, 1999 9:59 AM
        To:     MEMS@ISI.EDU
        Subject:        SU-8 help

        Hi everyone,

        I am using SU-8 to fabricate microparts.  I have checked the web
pages
        and read some papers, but I am still having difficulty.  My main
problem
        is obtaining the correct thickness (about 150 microns).  Another
problem
        is with my exposure.  I can't seem to find the right dose.  Any help
        would be greatly appreciated.

        Thanks in advance,

        Kristo Kriechbaum
        Carnegie Mellon University