durusmail: mems-talk: Cr wet etching
Cr wet etching
2011-07-20
2011-07-20
2011-07-22
2011-07-20
2011-07-22
Cr wet etching
Judith Linacero Blanco
2011-07-19
Hi all,

Does anybody know how to etch Cr with PMMA mask with Cr wet etching? I have
300nmPMMA and I would like to etch 200nm of Cr. Do you know the etch rate
and the concentration of wet etching?

Thanks a lot.
reply