If you're using the famous ceric ammonium etchant, the etch rate for
chromium is rather fast. I never measured it exactly, but 50 nm would
be etched away in maybe 10-20 seconds at room temp.


m

On 7/19/11, Judith Linacero Blanco  wrote:
> Hi all,
>
> Does anybody know how to etch Cr with PMMA mask with Cr wet etching? I have
> 300nmPMMA and I would like to etch 200nm of Cr. Do you know the etch rate
> and the concentration of wet etching?
>
> Thanks a lot.