Anyone with a dicing saw can do this for you. You might want to coat the
Cr-Au with resist to avoid micro scratches.

Shay

-----Original Message-----
From: mems-talk-bounces+shay=mizur.com@memsnet.org
[mailto:mems-talk-bounces+shay=mizur.com@memsnet.org] On Behalf Of Thomas
Reddy
Sent: Thursday, July 21, 2011 6:47 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Quartz wafer dicing

Hi everyone,

Does anyone know how I can dice my 4" quartz wafer to quarter pieces?
I should mention that I have a Cr-Au layers on my wafer and don't know that
is it possible to find any way for protecting them? Does fluid and soup of
the dicing saw damage my Cr-Au layers?

Regards,
Thomas