Hi,

Virginia Semiconductor in America can provide single crystal Si wafers to a
thickness of 5 micron.  They should be able to supply the wafers you are after .

Regards,

Mike Rosa.


At 09:35 19/11/98 +0900, you wrote:
>Hi.
>You may want to contact Mr. Michael Boyle at Bontronix in America.
>925-947-2664 (fax/tel)
>They may be able to help you with the spec.
>Good luck.
>
>-Y.K.
>
>Adam Cohen wrote:
>
>> Dear Colleagues,
>>
>> We are seeking a source for a small quantity of SOI wafers with a Si
>> thickness of about 50 microns for deep silicon RIE. We would prefer 4"
>> diameter wafers, but other sizes may be acceptable. Substrate/overall
>> thickness should be as large as possible.
>>
>> As an alternative to these, we are considering bonding a 50-micron Si wafer
>> to glass. Does anyone know good sources for thin wafers and flat glass
>> substrates, and someone who can do the bonding?
>>
>> If anyone has any leads, we'd much appreciate it.
>>
>> Thanks very much,
>>
>> Adam Cohen
>> University of S. California
>>
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