A reducing gas plasma works well. Typically up to 10% Hydrogen in an inert gas such as Argon or Nitrogen. Forming gas is one example. I have customers who use 100% Hydrogen plasma, I do not recommend this. Bill Moffat -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems- talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Shay Sent: Wednesday, July 20, 2011 11:03 PM To: 'General MEMS discussion' Subject: Re: [mems-talk] Removing oxide from Silver Die What's the oxide thickness? Or is it just the black tarnish which is usually sulfides? Shay