durusmail: mems-talk: Cr wet etching
Cr wet etching
2011-07-20
2011-07-20
2011-07-22
2011-07-20
2011-07-22
Cr wet etching
Roger Shile
2011-07-22
Nitrite? That's a new one on me, but whatever works...  I've used a
formulation containing Ceric ammonium nitrate to etch Cr.

Roger Shile

-----Original Message-----
Subject: Re: [mems-talk] Cr wet etching

it is a nitrite. Cerium-ammonium nitride does not exist (there would be
immediate proton transfer from NH4+ to N3-, and the whole thing would
either
explode, or at least heat up a lot)

Jaroslaw Syzdek
Ernest Orlando Lawrence Berkeley National Laboratory
Environmental Energy Technologies Division
Advanced Energy Technology
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