Ned tell us more of what you want to do.  For example with positive resist and
metal lift off you can do repeatable 0.1 micron dimensions.  Bill Moffat

________________________________________
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mems-talk-
bounces+bmoffat=yieldengineering.com@memsnet.org] on behalf of Ned Flanders
[howdilydoo@gmail.com]
Sent: Saturday, August 06, 2011 1:18 AM
To: Kevin Nichols
Cc: General MEMS discussion
Subject: Re: [mems-talk] Recommend a negative resist

Thanks, but I need something that I can easily strip. That excludes SU-8.

As for how thick: well, since I need 1 um resolution or better, it
should be thinner than 1 um.

m