durusmail: mems-talk: PMMA :deposition thickness
PMMA :deposition thickness
PMMA :deposition thickness
Richard Varjabedian
1999-05-31
This is a multi-part message in MIME format.

------=_NextPart_000_003F_01BEAB5A.2DE10300
Content-Type: text/plain;
        charset="iso-8859-1"
Content-Transfer-Encoding: quoted-printable

Hi everyboby,=20

    I'd like to get a 200 nanometer PMMA layer using a "spin coating" or =

something else ( if you already get it in an other way).

Does someone has experience using PMMA ?=20
Could you give me some hints to avoid the usual basic errors ?
Do you think I could meet some problems using a basic spin coating ?

Thanks in advance,=20
Richard, PhD student,
_________________________________________________
Richard Varjabedian richard.varjabedian@imfc.univ-fcomte.fr=20
LOPMD-Laboratoire d'Optique PM Duffieux (Besan=E7on)
16 route de Gray 25030 Besan=E7on Cedex,  France
t=E9l: (33)3 8166 6420,  Fax : (33)3 8166 6428
t=E9l personnel:  (33)6 6254 1240
"Try then error is better than no try"



------=_NextPart_000_003F_01BEAB5A.2DE10300
Content-Type: text/html;
        charset="iso-8859-1"
Content-Transfer-Encoding: quoted-printable








Hi everyboby,
 
    I'd like to get a 200 nanometer = PMMA layer=20 using a "spin coating" or
something else ( if you already get it in an other=20 way).
 
Does someone has experience using PMMA ? =
Could you give me some hints = to avoid the=20 usual basic errors ?
Do you think I could meet some problems using a = basic=20 spin coating ?
 
Thanks in advance,
Richard, PhD student,
_________________________________________________
Richard=20 Varjabedian richard.varjabedi= an@imfc.univ-fcomte.fr=20
LOPMD-Laboratoire d'Optique PM Duffieux (Besan=E7on)
16 route de = Gray 25030=20 Besan=E7on Cedex,  France
t=E9l: (33)3 8166 6420,  Fax : = (33)3 8166=20 6428
t=E9l personnel:  (33)6 6254 1240
"Try then error is = better than=20 no try"
 
 
------=_NextPart_000_003F_01BEAB5A.2DE10300--
reply