[mems-talk] Dry etch 50nm Au film, possible?

durusmail: mems-talk: Dry etch 50nm Au film, possible?

Dry etch 50nm Au film, possible?

2011-08-11

2011-08-11

2011-08-11

2011-08-11

2011-08-11

2011-08-14

2011-08-11

2011-08-11

2011-08-14

Dry etch 50nm Au film, possible?

Xiaohui Lin

2011-08-11

Hi all: Is it possible to use any dry etch receipt to etch Cr/Au film
(50nm)?

The mask of etching is Ni.