Try this paper for ideas:  http://www.csmantech.org/Digests/1999/PDF/12.pdf

Cheers,

Paul

On Thu, Aug 11, 2011 at 10:55 AM, Xiaohui Lin
wrote:

> Did you mean the recipe for silicon dioxide etch will work for Au etch?
>
> On Thu, Aug 11, 2011 at 1:16 AM, Shay  wrote:
>
> > OXIDE rie will do it
> >
> > Shay

*Paul F. Werbaneth*

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