Dear colleagues,

I am writing an article for an Institution of Electrical Engineers (IEE) journal
on microengineering.
To complete it, I need a picture of a MEMS device that uses bulk silicon
etching, and clearly shows
the 3D nature and the exposed crystal planes.

I thought this would be easy to find!! But after searching through the
literature and various
websites for a day, I can't find one of these pictures. Maybe they're now
considered too old (classic
status??) to be published any more. I could go on searching, but I thought a
request to this group
might bring a suitable photo from the archives.

So what am I looking for? The following gives some of the requirements:

1. crystallographically etched from single crystal silicon,

2. a view that clearly shows the 3D nature and the exposed crystal planes,

3. a dimensional scale,

4. any suitable structure - accelerometer, pressure sensor, fibre alignment,
etc.(but not a gyroscope,
I have soem of those of my own) - will do.

Apologies to all you people working on more modern technologies. I already have
loads of options
when it comes to thick resist and electroplating, deep reactive ion etching,
etc. What I am having
difficulty with is the 'old' stuff!!

If anyone can help, can you in the first instance send me an electronic (gif,
tif) version for the
outline article. When accepted, a photographic version would be appreciated. Any
photograph used
will, of course, have a suitable acknowlegement in the article.

Many thanks,

David Wood,
University of Durham.