Another PMMA question, that is more general in nature - when I e-beam evaporate
metal onto my PMMA resist - how much does it affect its sensitivity for
e-beam writing? during e-beam evaporation there's a lot of electrons and
x-rays in the chamber. I don't know how severe that is and how much it
affects the dosage during writing...

thanks in advance for any info on that.

Jaroslaw Syzdek
Ernest Orlando Lawrence Berkeley National Laboratory
Environmental Energy Technologies Division
Advanced Energy Technology
1 Cyclotron Road MS70R0108B Room 193
Berkeley, CA 94720-8168 (GMT-8)
United States of America