Dear Friends,

Applying reverse potential on Si-glass anodically bonded samples,
and at what stage(temperature/voltage) debonding occures,

can anybody share their experience?

Ashwini

2011/8/17 柳俊文 :
>
> Thank you for your reply !
>
> I have done the Si-Si bonding and anodic bonding successfully on the EVG520.
>
> The bonding glass wafer is Pyrex7740 glass wafer with good surface quality.
>
> I didn't adopt high temperature such as 600 ℃ because I want to do low
temperature glass-glass bonding.
>
> Does anyone have more experience on the glass-glass bonding?
>
> Thank you !
>
> Evan