We usually order stuff like that from Entegris. I didn't see it in a quick
perusal of their website at wafercare.com, but I know they have stuff off
catalog, so they may be able to help you if you give them a call.

Jesse

P.S. You didn't specify what diameter of wafers you're using.



From:   Sarah McQuaide 
To:     mems-talk@memsnet.org
Date:   09/01/2011 15:24
Subject:        [mems-talk] small batch wafer processing for wet chemistry
Sent by:        mems-talk-bounces+jesse.d.fowler=aero.org@memsnet.org



Does anyone know of a manufacturer of small (5 or 10 slot) wafer cassettes
for wet chemical processing? I realize most tooling is built for industry
standard 25-wafer cassettes, but I am only inquiring about wet chemical
baths as processing in smaller containers with smaller cassettes would
save
us a lot of dollars in chemicals.

Thanks in advance.