Fabrication of large area ultrathin silicon membrane: Application for high efficiency extreme ultraviolet diffraction gratings* C. Constancias,a B. Dalzotto, and P. Michallon CEA Grenoble-MINATEC, 17 rue des Martyrs, F38054 Grenoble, France J. Wallace Center for NanoTechnology, University of Wisconsin-Madison, 425 Henry Mall, Suite 2130, Wisconsin 53706 M. Saib CNRS-LTM Grenoble-MINATEC, 17 rue des Martyrs, F38054 Grenoble, France Received 20 July 2009; accepted 14 December 2009; published 28 January 2010 Silicon membranes of 100 nm thick and below over several mm2 have been fabricated for high efficiency extreme ultraviolet EUV transmission grating. The perfect planarity 1 nm and the high transparency 80% at 13.5 nm wavelength have been measured. In comparison to SiNx membranes 40% transmission, the silicon membranes allow high resolution EUV interference lithography using the second order diffraction of the molybdenum grating. The fabrication of such phase gratings has been performed and the diffraction efficiency measurement is 27% for the silicon membrane and the Mo grating. C 2010 American Vacuum Society. DOI: 10.1116/1.3290746 Marco ============================================== Marc Reinig Phone: (831) 459-4362 Laboratory for Adaptive Optics Fax: (831) 459-5717 UCO/Lick Observatory Email: mreinig@ucolick.org University of California, Santa Cruz 1156 High Street Santa Cruz, CA 95064 > -----Original Message----- > From: mems-talk-bounces+mreinig=ucolick.org@memsnet.org > [mailto:mems-talk-bounces+mreinig=ucolick.org@memsnet.org] On Behalf > Of Andrea Mazzolari > Sent: Friday, October 07, 2011 6:10 AM > To: General MEMS discussion > Subject: [mems-talk] ultra thin silicon membranes > > Hi All, > > I'm looking for information on ultra-thin silicon membranes (thickness less > than 500nm). > In particular I'm looking for > > 1) papers which describes realization of such membranes, up to now I've > found only Journal of the Korean Physical Society, Vol. 53, No. 2, pp. 579-583 > J. Vac. Sci. Technol. B 28(1) > > 2) applications of ultra-thin silicon membranes > > Is there any suggestion on this topic ? > > Thanks in advance, > Andrea Mazzolari >