Hi,
In my view, I think a wet chemical corrosion maybe efficient. What's more, I
don't think Ar plasma could react with metal or inorganic compounds but organic
compounds.

Zhixiu Liang  from Wuhan University


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Subject: Recipe of Ar plasma etching gold (Yingtao Tian)

Hello everyone,

Can anybody give a recipe of Ar plasma etching Au and Cr? I have a double layer
of Cr/Au about 100nm to remove but have no experience with this before..
Appreciate if you could share the recipe.

thanks,
Yingtao