I am using SU8 2005 on 1mm thick glass substrate coated with 50nm Cr/Au.

spin coat 4krpm
bake 95C, 3min
exposure 8s
PEB:   65C, 7min
develop: 40s

I am getting a pretty rough sidewall as the picture in the following link.

Could anyone suggest what is the problem?

Thanks.

https://plus.google.com/u/0/photos/113316121597573259487/albums/5672855410267307
473



Thanks