What is RCA cleaning?

Today I proved during 1 hour with NMP sonicate, but I have something in my
sample!

Tomorrow I'll try with NMP at 80ºC. If my sample is not cleaned, then I use
RIE with O2, but I'm afraid if this process would modify my sample.

Best regards,

2011/11/8 Jorge Ramiro 

> Hi Judith,
>
> Have you tried a RCA cleaning? The first step, SC1, removes organic
> contaminants.
> Other options are using a "piranha" etch or an oxygen plasma.
> Best regards,
>
> Jorge Ramiro
>